$CM_FORMAT JEOL/EO
$CM_VERSION 3.01
$CM_COMMENT 
$CM_DATE 2025-04-30
$CM_TIME 11:04:27
$CM_OPERATOR General
$CM_INSTRUMENT InTouchScope
$CM_ACCEL_VOLT 20
$CM_MAG 3300
$CM_SIGNAL BEC
$CM_STAGE_POS 4.714 -8.075 13.000 0.000 0.000
$CM_STAGE_X 4.714
$CM_STAGE_Y -8.075
$CM_STAGE_T 0.000
$CM_STAGE_Z 13.000
$CM_STAGE_R 0.000
$$SM_MICRON_MARKER 5m
$$SM_FILM_NUMBER 0
$$SM_TITLE 
$$SM_WD 10
$$SM_SPOT_SIZE 61
$$SM_VACUUM 40
$$SM_PHOTO ON
$$SM_MERGE 
$$SM_SIGNAL1 
$$SM_SIGNAL2 
$$SM_MULTI 
$$SM_VAC_MODE LV
